Performance
Signal Level [dBFS] | Measured Peak [mV] | Typical position RMS (μm) | Typical phase RMS (°) |
|---|---|---|---|
| 0 |
4000 | 3 | 0.01 |
-20 |
400 | 3 | 0.01 |
-40 |
40 | -13 | 0.04 |
-60 |
4 | 150 | 0.25 |
Parameters
Parameter | Value |
|---|---|
| Number of input channels (measuring) |
20 (4 per module + reference channel) |
| ADC resolution |
16 bits |
| Max. ADC sampling clock frequency |
up to 130 MHz |
| Memory size per module |
up to 8 Gbits |